Fabrication & Design of Resonant Microdevices

Editeur: Elsevier Science Date de sortie: 2008-10-20

Description

This book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). Concepts of resonance are introduced, with an overview of fabrication techniques for micromachined devices - important to understand as design options will depend on how the device will be fabricated. Also explained: excitation and signal detection methods; an analytic model of device behavior (a valuable design tool); numerical simulation techniques; issues of damping and noise for resonant MEMS; electronic interfacing; packaging issues; and numerous examples of resonant MEMS from academia and industry.Offers numerous academic and industrial examples of resonant MEMSProvides an analytic model of device behaviourExplains two-port systems in detailDevotes ample space to excitation and signal detection methodsCovers issues of damping and noise for resonant MEMS, two topics of particular importance for high-Q devices

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Informations complémentaires

Genre: Engineering: general

Collection: William Andrew

Format: Adobe PDF

Pages: 250

ISBN: 9780815519713

Informations complémentaires

Genre: Engineering: general

Collection: William Andrew

Format: Adobe PDF

Pages: 250

ISBN: 9780815519713

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